EVAPORATED THIN FILMS AND COATINGS
Lebow Company deposits electron beam evaporated thin films for numerous applications including impurity injection targets of a wide range of materials. Films and targets from a few Angstroms to over 10 microns, in single and multi-layers, have been supplied to laboratories worldwide. The following price list covers the most often requested films and targets on microscope slides, 2 inch nominal squares (1.925 inch, 49mm) or on most customer supplied substrates.
The price list covers cleaning and coating of up to 12 customer supplied substrates within a 200 x 195mm area. Substrates of 2 inch x 2 inch nominal (49mm), 12 per lot, 1 inch x 3 inch microscope slides, 12 per lot, or 2 inch x 3 inch microscope slides, 8 per lot are supplied at no charge. Other substrate materials can also be supplied and we would be pleased to quote your special requirements. We are able to coat cylinders, rods, the edges of discs, wires (including microwires) and plastics.
In addition to the run fee below, add a set-up fee below of $150.00 per material (except Al and Au).
LEGEND for symbols used in list below:
N2 Bag – Dry Nitrogen Bag out of system and hermetic packing required: $650.00 each run
C – Clean up fee of $400.00
CC – Clean up fee of $800.00
T – Toxic Fee of $400.00
+ – Plus cost of material per micron
Al
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | 5-10 MICRON |
| Al | $650.00 | $700.00 | $800.00 | $1,000.00 |
Al2O3 MATERIAL <0.5 MICRON 0.5-1.5 MICRON 1.5-3 MICRON Al2O3 $600.00 $700.00 $1,000.00
AgMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Ag $500.00 $550.00 $700.00 $1,100.00
As MATERIAL <0.2 MICRON 0.2-0.5 MICRON As (T & CCC) $1,000.00 $1,700.00
AuMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Au (+$500/micron) $500.00 $550.00 $650.00 $1,000.00
BMATERIAL <0.2 MICRON 0.2-0.8 MICRON 0.8-1.5 MICRON B (T & C) $1,000.00 $1,700.00 $3,500.00
BeMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Be (T & C) $1,000.00 $1,500.00 $2,000.00
Bi
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Bi (T & C) | $700.00 | $800.00 | $1,100.00 |
C
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| C (CC) | $1,200.00 | $1,800.00 | $3,400.00 |
CaF2MATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON CaF2 $500.00 $550.00 $800.00
CdMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Cd (CC) $500.00 $550.00 $700.00
CdTeMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON CdTe (T & C) $500.00 $700.00 $1,000.00
CoMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Co $500.00 $550.00 $700.00 $1,100.00
Cr MATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Cr $500.00 $600.00 $800.00
CslMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Csl $500.00 $550.00 $800.00
CuMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Cu $500.00 $550.00 $800.00 $1,200.00
FeMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Fe $500.00 $700.00 $1,000.00 $1,500.00
GeMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Ge $1,000.00 $1,200.00 $2,200.00 $3,600.00
Gd
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Gd (C) | $600.00 | $700.00 | $1,100.00 |
HfMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Hf $800.00 $1,100.00 $1,700.00
InMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON In (C) $1,000.00 $1,500.00 $2,000.00 $2,500.00
IrMATERIAL <1 MICRON 1-3 MICRON Ir (+$10,000/micron) $1,500.00 $2,200.00
ITOMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON ITO $1,000.00 $1,500.00 $2,700.00
KClMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON KCl $500.00 $700.00 $1,000.00
KF
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| KF (C & N2 Bag) | $600.00 | $700.00 | $1,100.00 |
Kl
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Kl (C) | $500.00 | $700.00 | $1,000.00 |
LiCl
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| LiCl (C & N2 Bag) | $500.00 | $700.00 | $1,000.00 |
LiFMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON LiF $500.00 $700.00 $1,000.00
MgMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Mg (C) $1,000.00 $1,700.00 $2,800.00
MgF2MATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON MgF2 $500.00 $550.00 $700.00
MnMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Mn $1,000.00 $1,500.00 $2,500.00 $4,000.00
MoMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Mo $800.00 $1,100.00 $1,600.00 $2,200.00
NaMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Na (CC & N2 Bag) $1,100.00 $1,200.00 $2,200.00
NaCl
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | 5-10 MICRON |
| NaCl (C) | $500.00 | $600.00 | $1,000.00 | $1,700.00 |
NaFMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON NaF $500.00 $600.00 $1,000.00 $1,700.00
Nb
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Nb | $800.00 | $1,100.00 | $1,600.00 |
NdMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Nd (C & N2 Bag) $800.00 $1,500.00 $2,000.00
NiMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Ni $500.00 $550.00 $700.00 $1,100.00
Pb
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Pb (CC) | $800.00 | $1,200.00 | $2,000.00 |
Pd
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Pd (+$500/micron) | $800.00 | $1,500.00 | $2,000.00 |
Pt
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Pt (+$500/micron) | $800.00 | $1,500.00 | $2,000.00 |
Re
| MATERIAL | <1 MICRON | |||
| Re (+$700/micron) | $1,500.00 |
Rh
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Rh (+$9000/micron) | $1,500.00 | $2,000.00 | $3,000.00 |
Ru
| MATERIAL | <1 MICRON | |||
| Ru (+$2000/micron) | $1,500.00 |
S MATERIAL <1 MICRON 1-3 MICRON S (CCC) $1,500.00 $2,500.00
SbMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Sb (C) $800.00 $1,500.00 $2,500.00
Sc
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Sc (C & +$200/micron) | $800.00 | $1,000.00 | $1,400.00 |
SeMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Se (T & CC) $1,700.00 $2,900.00 $4,200.00
Si
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | 5-10 MICRON |
| Si | $1,000.00 | $1,400.00 | $2,500.00 | $3,600.00 |
SiOxMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON SiOx $600.00 $900.00 $1,400.00
SiO2MATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON SiO2 $600.00 $900.00 $1,400.00
Sn
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | 5-10 MICRON |
| Sn (C) | $500.00 | $600.00 | $1,000.00 | $1,400.00 |
SnO3
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| SnO3 | $1,000.00 | $1,500.00 | $2,200.00 |
TaMATERIAL <1 MICRON Ta $1,500.00
Te
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Te (T & CC) | $700.00 | $1,100.00 | $1,900.00 |
Th
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| Th (T & C & +$400/micron) | $1,000.00 | $1,500.00 | $2,200.00 |
TiMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Ti $500.00 $550.00 $700.00 $1,100.00
TiO2MATERIAL <1 MICRON 1-3 MICRON TiO2 $600.00 $900.00
VMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON V $550.00 $600.00 $800.00 $1,400.00
W
| MATERIAL | <1 MICRON | 1-3 MICRON | 3-5 MICRON | |
| W | $2,000.00 | $2,800.00 | $3,900.00 |
YMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Y $1,000.00 $1,500.00 $2,400.00
YbMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON Yb (C) $1,000.00 $1,500.00 $2,400.00
ZnMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Zn (C) $500.00 $600.00 $800.00 $1,100.00
ZnSMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON ZnS (C) $800.00 $1,200.00 $1,800.00
ZrMATERIAL <1 MICRON 1-3 MICRON 3-5 MICRON 5-10 MICRON Zr $550.00 $600.00 $800.00 $1,400.00
Extra Substrates – $15.00 each to the capacity of coating area of chamber.
Multiple layers – Add 1/2 of the least expensive layer prices for 2nd and 3rd layer.
Hermetic Packaging – $150.00
Deposition Masks:
Clean and first set-up (one time) $150.00/mask
Loading clean masks $15.00/substrate ($100 max)
Aligning masks by hand $30.00/mask Tape masking $25.00 each
Deposition thru masks (2nd and following $10.00 each runs with clean, previously set up masks)
Rotation of Substrates (e.g. Coating cylinders or rods) prices starting at: $350.00 for fixture set-up
Delivery 4-8 weeks